Shenyang Instrument Research Institute III Project Appraisal of Scientific and Technological Achievements

It is reported that recently held by the Shenyang Municipal Bureau of Science and Technology Achievements Department, held in Shenyang Institute of Instrumentation held three scientific research projects of scientific and technological achievements appraisal meeting. Scientific and technological department's 11th five-year support project "Sensor testing key common technology research", the Ministry of science and technology scientific research institute special funds project "continuous optical density filter device", "SOI pressure sensor manufacturing process" carried out science and technology Identification of results. The expert group carefully reviewed the data, listened to the detailed report of the project team, and inspected the development site and the physical object. After questioning and commenting, they agreed that:

The "Sensor Testing Key Common Technologies Research" project has broken through key technologies such as high-performance sensors "high-efficiency high-voltage high-voltage waveform test equipment," "batch detection system weak signal detection," "reliability enhancement test" and other technologies, in the silicon capacitive sensor batch testing system. The "fixture design" and "compensation method" and the "composite waveform control" of the high-efficiency and high-pressure sensor of the sensor are innovative. Achievements The main performance indicators and key technologies have reached the international advanced level, which plays an important supporting role in promoting industrial technological progress and enhancing product market competitiveness.

The "Optical Density Continuous Change Filter Device" project carried out research on the design and manufacturing process of a neutral graded film, and developed a continuous optical density filter device with good linearity and neutrality. The linearity and neutrality all reached ± 5%. It solves the key technical problems such as optical density linear gradient film design, neutral film plating, mask mechanism design, and mask mechanism motion control. It is innovative in terms of linear iterative fitting speed regulation and stepwise speed regulation. The research and development of filter devices have filled the gaps in China and have achieved mass production. The major performance indicators have reached the international advanced level.

"SOI pressure sensor manufacturing process research" project carried out the research of SOI pressure sensor manufacturing process, built a high-temperature SOI pressure sensor manufacturing technology platform with independent technology and intellectual property support, and realized the stability of high-temperature SOI pressure sensor batch production process. The surface doping concentration control method was used to solve the low drift technical problem and the stability of the sensitive device was 0.005%F. S. /8h; using multi-layer thin film low stress matching technology, to achieve stable and repeatable production of sensitive chips; using Cr-Ni–Au composite high temperature electrode preparation technology to achieve stable operation of the sensitive chip at 300 °C. Project achievements have filled domestic gaps and major performance indicators have reached the international advanced level. The appraisal committee unanimously agreed that the three projects pass the results appraisal

The expert group gave a high evaluation of the project management and implementation of the Shenyang Institute of Instrumentation Science and Technology, fully affirmed the quality of the completed project, and proposed to continue to use its advantages on an existing basis to further promote the application and expand the application areas.